Plasma cleaning machine

product description

The laboratory plasma cleaning machine adopts a compact vertical design, occupies a small space, and is suitable for colleges, research institutes, and various laboratory environments. This device is mainly used for cleaning, activating, etching, and coating the surfaces of materials such as semiconductors, precision electronic components, optical devices, biochips, ceramics, and metals. It can effectively remove surface pollutants (such as organic matter, oxides, particles, etc.), improve material surface performance, and enhance the quality and reliability of subsequent processes (such as bonding, coating, bonding, etc.).

PRODUCT FEATURES

1. * * Cleaning and activation

Using * * plasma technology, through the dual effects of high-energy particle bombardment and chemical reactions, surface pollutants are quickly removed from materials, significantly increasing surface activation energy and greatly enhancing surface hydrophilicity or hydrophobicity.

2. Precise process control

Equipped with high-precision gas flow control system, power regulation system, and temperature monitoring system, plasma processing parameters (such as gas type, flow rate, power, processing time, chamber pressure, etc.) can be set and controlled according to different material and process requirements, achieving repeatability and stability of the process.

3. Multi functional processing mode

Supporting the single or mixed use of multiple gases (such as argon, oxygen, nitrogen, hydrogen, etc.), it can achieve various processing modes such as cleaning, activation, etching, deposition, etc., meeting the diverse needs of different materials and application scenarios.

4. Low damage treatment

The processing is carried out at low or room temperature, avoiding damage to sensitive materials (such as polymer materials, biomaterials, etc.) caused by traditional wet chemical cleaning or high-temperature treatment, ensuring that the original properties of the materials are not affected.

5. Easy to operate and safe

Adopting a user-friendly human-machine interface design, the operation process is simple and intuitive, and the equipment is equipped with comprehensive safety protection devices (such as overvoltage protection, overheating protection, gas leakage protection, etc.) to ensure the safety of operators and the stable operation of the equipment.

6. Environmental protection and energy conservation

No need to use chemical solvents, avoiding the generation and discharge of chemical waste liquids, and meeting environmental protection requirements; The equipment has low energy consumption, low operating costs, and good economic and environmental benefits.

OPTIONS

·1. Gas flow controller: Achieve precise control and regulation of various gas flow rates to meet the precise requirements of complex processes for gas flow.

·2. Sample rotation device: It rotates the sample uniformly during the processing to ensure the uniformity of plasma treatment, and is suitable for samples with high requirements for processing uniformity.

·3. Vacuum measuring device: Real time measurement of chamber vacuum degree, providing reliable data support for the control of process parameters.

·4. Exhaust gas treatment device: Purify the exhaust gas generated during the treatment process, remove harmful gases, and ensure the safety of the laboratory environment.

APPLICATION AREA 

·In the field of semiconductors and electronics, cleaning before chip packaging, surface activation of PCB boards, removal of surface contaminants from electronic components, etc.

·Optics field: pre coating cleaning of optical lenses, fiber end face treatment, surface cleaning of precision optical components, etc.

·Biomedical field: surface modification of biochips, surface activation of medical catheters, surface treatment of implantable medical devices, etc.

·Materials research field: surface modification of nanomaterials, surface modification of polymer materials, surface activation of metal and ceramic materials, etc.

·Other fields: surface treatment of aviation precision components, surface cleaning and activation of jewelry, surface treatment of cultural relics protection materials, etc.