ZF350 organic and inorganic combined coating instrument

Equipment Purpose: 

Coating of organic-inorganic complexes (primarily organic). 

Technical Requirements: 

1. Coating Chamber: The coating chamber is approximately 350 x 450 mm in size and constructed of stainless steel. It features a cylindrical front-opening door with an internal anti-fouling panel. 

2. Exhaust System: A molecular pump + mechanical pump system is used. 

2.1. Vacuum Level: The ultimate vacuum of the coating chamber is ≤ 6 × 10-4 Pa. 

2.2. System Leakage Rate: ≤ 1 × 10-7 PaL/s. 

3. Evaporation Source System: 

3.1. One organic evaporation source with a capacity of 5 ml and one evaporation power supply with temperature measurement and control, a heating temperature of 400°C, and a power output of 0.5 kW. 

3.2. Baffle: The evaporation source baffle is manually magnetically controlled for opening. 

3.3. Installation: The evaporation source is installed on the bottom of the vacuum chamber. 

4. Sample Holder System: 

4.1. The sample holder can hold samples and glass slides up to 100 mm in size. 

4.2. The sample holder rotates at a speed of 0 to 30 rpm. 

4.3. Installation: The sample is mounted on the upper cover of the vacuum chamber, and the evaporation source is mounted on the lower cover of the vacuum chamber. The evaporation source is equipped with a baffle for upward evaporation and coating. 

5. During the coating process, the sample is heated and baked, with a maximum baking temperature ranging from room temperature to 400°C, controlled by temperature measurement. 

6. The equipment is equipped with an interlocking protection alarm for water and power outages, as well as an anti-misoperation protection alarm. 

Implementation Plan: 

The equipment primarily consists of a vacuum pumping and measurement system, a coating chamber system, an evaporation source and control system, a sample stage system, auxiliary systems, and an electronic control system.