Desktop resistance thermal evaporation coater

1. Chamber size: Ф246×228mm (specific dimensions subject to design), 1Cr18Ni9Ti** stainless steel, argon arc welding; the entire chamber can be placed in a glove box;

2. Sample stage size: detachable, size 60×60mm, rotation: 0-20r/min adjustable; substrate can be heated to 300±1℃ (optional) ;

3. Vacuum system: mechanical pump (TRP-12, 3L/s) + Pfeiffer molecular pump (Hipace80, 67L/s); GDC-25b solenoid flapper valve;

4. Ultimate vacuum: 8.0×10-5Pa;

5. Vacuum pumping speed: atmosphere ~ 8×10-4Pa≤30min;

6. Vacuum measurement: full-range compound vacuum gauge, measuring range: 105Pa～10-5Pa;

7. Evaporation source: 3 groups of water-cooled resistance evaporation sources, switchable between the 3 groups, with anti-fouling plates between the sources;

8. Evaporation power supply: 1 DC evaporation power supply, 0W~2000W continuously adjustable, for switching between 3 sets of evaporation sources;

9. Film thickness control system: imported Inficon SQM-160 single water-cooled probe, control accuracy 0.1Å;

10. Control mode: PLC + touch screen intelligent control system, with functions such as air leakage self-detection and prompt, communication fault self-detection, maintenance prompt, etc.

11. Equipment appearance: L60cm×W60cm×H80cm mechatronic frame, with one CF35 flange interface reserved;

12. The total power supply of the equipment is ≤ 2KW, 220V, single-phase three-wire system (one live, one neutral, and one ground);

13. Cooling circulation system: water pressure 0.2~0.4MPa, water temperature 10~25℃, providing stable cooling water to equipment-related components that require water cooling .