CVD CHEMICAL VAPOR DEPOSITION

APPLICATION

Chemical vapor deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technique in the semiconductor industry for depositing various materials, including a wide range of insulating materials, most metal materials, and metal alloy materials.

PRODUCT DESCRIPTION

The CVD tube furnace system consists of a heating system, a vacuum acquisition system, and a gas path system.

The tube furnace can choose different pipe diameters and the length of the constant temperature zone, and the stainless steel sealing flanges at both ends of the furnace tube can also choose high vacuum flanges and low vacuum flanges;

The vacuum acquisition system can choose different vacuum pumps according to experimental requirements. The vacuum degree of rotary vane mechanical vacuum pump is ≤ 5Pa, and the vacuum degree of molecular pump vacuum unit is 1x10-4Pa;

The gas supply system can choose from 3 float manual and 3 automatic mass flow systems.

Digital composite vacuum gauge or Pirani vacuum gauge is used for vacuum measurement.

The built-in RS485 digital communication port and USB adapter of the temperature controller can be optionally configured to connect to a PC for remote control and monitoring of the system, and can also save or export test results.

The product complies with the EU CE standard.

PRODUCT FEATURES

Furnace material: Polycrystalline inorganic alumina ceramic fiber material prepared by temperature method vacuum filtration molding.

Furnace tube material: Quartz tube is used at 1200 ℃/high-purity corundum tube is used at 1700 ℃.

Temperature control instrument: intelligent microcomputer PID temperature control instrument, SCR/SSR control, PID parameter self-tuning function; Programmable for 30 time periods, including program heating, program insulation, and program cooling.

Heating rate: 1-25 ℃/min * * adjustable.

Furnace body structure: furnace temperature control integrated structure, furnace opening and closing type; Double layered shell, air circulation insulation.

Sealing performance: The furnace tube is equipped with stainless steel metal flanges at both ends, matched with bright temperature PTFE gaskets, and can work under vacuum with a vacuum degree of ≤ 5Pa (rotary vane vacuum pump).

Atmosphere performance: There are inlet and outlet ports at both ends of the flange, and the pressure gauge is installed on the metal flange. The precision needle valve can adjust the inlet and outlet volume, and can introduce gases such as nitrogen, argon, hydrogen, etc.

Equipment protection: Modular control, which will emit sound and light signals in case of overheating or disconnection during operation, and automatically complete the protection action.

L Safety protection: There is an air circuit breaker installed on the equipment, which will automatically trip in case of short circuit leakage, protecting the safety of the equipment and operators.