Chemical Vapor Deposition Tube Furnace CVD-1400℃

1. Product Description

【Product Name】 1400℃-CVD Chemical Vapor Deposition Tube Furnace

【Furnace tube size】φ25--φ120mm

【Heating area】300mm

【Rated temperature】1400℃

【Temperature control accuracy】±1℃

[Application Areas] 1400℃-CVD chemical vapor deposition tube furnace refers to a method in which chemical gases or vapors react on the surface of a substrate to synthesize coatings or nanomaterials. It is a technology used in the semiconductor industry to deposit a variety of materials, including a wide range of insulating materials, most metal materials and metal alloy materials.

This series of products is mainly aimed at heat treatment of samples under vacuum or protective atmosphere. The high-quality furnace material and stable temperature control system can ensure the reliability of experimental data. The product adopts new ceramic fiber material as the furnace material, the furnace tube is made of excellent material, and the stainless steel flanges at both ends of the furnace tube are sealed. It can work under vacuum. There are air inlet and air outlet on the flange to introduce protective gas. The precision needle valve can adjust the air flow.

2. Product Features

1. The furnace is made of high-purity alumina ceramic fiber material with a new assembly structure, which is durable and will not deform at high temperatures .

2. The heating element adopts silicon carbon rod, which can bear large load, stable and long service life ;

3. The furnace tube is made of quartz tube, and the stainless steel flanges at both ends are simple, reasonable and easy to disassemble, making it convenient for the sintered samples to be taken in and out ;

4. The heating speed is fast, and it usually takes 50 minutes to rise from room temperature to 1400 degrees Celsius ;

5. Adopt intelligent PID temperature control instrument, with high temperature control precision, small temperature surge, temperature compensation and temperature correction functions, with an accuracy of ±1℃ ;

6. The temperature control instrument has a program function, which can set the temperature rise curve and is programmable in 30 sections ;

7. Integrated structure, excellent appearance design, beautiful and generous ;

8. All electronic components are Delixi products with leakage protection function ;

9. The machine will send out an alarm signal if the temperature exceeds the set limit during operation and automatically complete the protection action ;

10. When the instrument program is set, just press the run button and the following work will be completed automatically ;

11. Optional large-screen paperless recorder can realize real-time recording of heating curve, and a memory card can be used to analyze and print experimental data ;

12. Gas mass flow meter is optional, and the incoming gas can be digitally and accurately controlled .