Gradient Chemical Vapor Deposition Tube Furnace CVD-1200℃

1. Product Description

【Product Name】 1200℃-CVD Chemical Vapor Deposition Gradient Tube Furnace

【Furnace tube size】φ25--φ120mm

【Heating area】300mm+300mm

【Rated temperature】1200℃

【Temperature control accuracy】±1℃

[Application Areas] Chemical vapor deposition (CVD) refers to a method in which chemical gases or vapors react on the surface of a substrate to synthesize coatings or nanomaterials. It is the most widely used technology in the semiconductor industry for depositing a variety of materials, including a wide range of insulating materials, most metal materials, and metal alloy materials.

1200℃-CVD chemical vapor deposition gradient tube furnace refers to a method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a technology used in the semiconductor industry to deposit a variety of materials, including a wide range of insulating materials, most metal materials and metal alloy materials.

2. Product Features

Furnace shell

1. The outer shell is made of Q235 low carbon steel, with electrostatic and drug-resistant coating on the surface to resist corrosion ;

2. The strong double-layer metal frame is matched with the heat-insulating fan structure, so the furnace surface temperature is low ;

3. Horizontal use, top opening structure, easy to operate .

refractory materials

The multi-layer insulation design is composed of lightweight alumina ceramic fiber and high-quality insulation board backing. It does not contain asbestos components, with low heat loss and low energy consumption .

Heating system    

1. High-quality HRE spiral resistance wire heating element is firmly embedded in the furnace surface , and heats freely in the furnace cavity through heat radiation, with a long service life ;

2. The resistance wire is heated in a circular manner to achieve good uniformity in the furnace .

Temperature control panel

1. PID combined with SSR control mode, accurate temperature control ;

2. Internationally standardized N-type nickel-chromium-silicon thermocouple, temperature measurement range 0-1300℃, long service life ;

3. The furnace door is equipped with a power-off protection switch when the door is opened .

Program controller

1. Controller adapted to complex process requirements ;

2. Simple and direct operation, flexible programming ;

3. 4 curves can be programmed, and 8 program segments for each curve ;

4. Over-temperature and fault alarm, automatic protection .

Vacuum atmosphere function

1. With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube ;

2. High-quality quartz glass working tube, metal or corundum working tube can also be selected to adapt to different working conditions ;

3. High-performance bipolar rotary vane vacuum pump, which can achieve a vacuum degree of 5 Pa, and a digital vacuum gauge can display the vacuum degree ;

4. Equipped with gas circuit control unit, the control unit can select 1-3-way MFC automatic control system .