Intelligent slide-type CVD system 1200℃

1. Equipment Introduction:

The equipment consists of five main components: the heating system, the vacuum system, the gas control and supply system, the automatic control and movement system, and the control software system. The furnace chamber has a 440mm temperature zone and is equipped with a K-type thermocouple for single-point temperature control. The heating furnace is mounted on slide rails and can be manually slid to the desired position within a specified range and secured with a stopper. The gas system is controlled by a four-way flow meter, with mixed gas flowing through a stainless steel mixing tank before entering the left-end air inlet flange. A single air inlet port is reserved on the left-end flange end cap, with an internal stainless steel air guide pipe to direct gas into the heating zone. This equipment is suitable for use in universities, research institutes, and R&D-focused enterprises.

2. Equipment parameters: