1. Product Features :

1. HDPE inner cavity, solvent-resistant PC transparent cover ;

2. Industrial machine design, PLC control, 7-inch full-color touch screen operation ;

3. High-precision servo motor drive, high precision and high repeatability ;

4. Can be embedded in the glove box to reduce the operating height ;

5. Back cleaning and edge glue removal functions can be added to meet industrial machine applications ;

6. Anti-splash cover cleaning and developing functions can be added to meet customized needs ;

7. Processable substrate size range: fragments to 8-inch round substrates .

2. Product parameters :

1. Speed range: 20-10000rpm ;

2. Speed adjustable accuracy: 1rpm ;

3. Speed accuracy: ±0.1rpm ;

4. Acceleration controllable range: 20-50000rpm/s

5. Single step duration: 3000s ;

6. Time resolution: 0.1s ;

7. Process time setting: 0-3000 sec/step ;

8. Time setting accuracy: 0.1 sec ;

9.Weight: 20Kg ;

10. Uniformity data

±0.49% within 4-inch wafer ±0.55% between sheets Film thickness: 500nm Glue: RZJ304 diluted (<10CP)

±0.76% within 6-inch wafer Inter-chip ±0.91% film thickness: 1300nm Glue: AZ1500 (20CP)

±0.92% within 8-inch wafer Inter-chip ±1.10% film thickness: 1350nm Glue: AZ1500 (20CP)

11. 100 sets of 100-step programs can be programmed, and more can be expanded ;

12. With four-way automatic dispensing port, it can be upgraded to multi-way automatic dispensing function ;

13. Standard vacuum carrier plates with three diameters: 10mm, 25mm and 2 inches.