EZ6-S Smart Spinning Machine

1. Product Features

1. Industrial-grade BLDC motor and single-chip microcomputer control ;

2.7-inch full-color touch screen human-machine interface operation ;

3. Ultra-high polymer material inner cavity, stainless steel outer shell ;

4. Specially designed anti-glue ingress and anti-glue blocking functions ;

5. Can be upgraded to have one-way precise measurement and automatic dispensing function ;

6. With vacuum switch and lid switch safety interlock function ;

7. Maximum recommended spin coating substrate size: 6-inch round substrate .

2. Product Parameters

1. Speed range: 100-12000rpm ;

2. Speed resolution: 1rpm ;

3. Acceleration adjustable range: 100-30000rpm/s ;

4. Maximum single step length: 3000s ;

5. Time resolution: 0.1s ;

6.Weight: 12Kg ;

7. Single-step or multi-step operation is optional, and 10 groups of 10-step programs can be programmed ;

8. Two models are available: AC110V and AC220V, with Chinese and English interfaces available ;

9. Standard vacuum carrier plates with three diameters: 10mm, 25mm and 2 inches ;

10. Uniformity data

±0.53% within 4-inch wafer Inter-chip ±1.09% film thickness: 1350nm Glue: AZ1500 (20CP)

±1.20% within 6-inch wafer Inter-chip ±1.89% film thickness : 4400nm Glue: SPR220-4.5 (123CP)