Standard program-controlled servo glue spreader AC200-SE

1. Product Features :

1. With forward and reverse rotation function ;

2. HDPE inner cavity, solvent-resistant PC transparent cover ;

3. High-precision servo motor drive, high precision and high repeatability ;

4. Industrial machine design, PLC control, 7-inch full-color touch screen operation ;

5. Can be embedded in the glove box to reduce the operating height ;

6. Processable substrate size range: fragments to 8-inch round substrates ;

7. Back cleaning and edge glue removal functions can be added to meet industrial machine applications ;

8. Anti-splash shield cleaning and developing functions can be added to meet customized needs .

2. Product parameters :

1. Speed range: 20-10000rpm ;

2. Speed adjustable accuracy: 1rpm ;

3. Speed accuracy: <±1rpm ;

4. Acceleration adjustable range: 20-50000rpm/s ;

5. Single step duration: 3000s ;

6. Time resolution: 0.1s ;

7. Process time setting: 0-3000 sec/step ;

8. Time setting accuracy: 0.1 sec ;

9. 100 sets of 100-step programs can be programmed, and more can be expanded ;

10. With four-way automatic dispensing port, it can be upgraded to multi-way automatic dispensing function ;

11. Standard vacuum carrier plates with three diameters: 10mm, 25mm and 2 inches ;

12. Uniformity data

±0.49% within 4-inch wafer ±0.55% between wafers Film thickness: 500nm Glue: RZJ304 diluted (<10CP)

6-inch wafer intra-wafer ±0.76% inter-wafer ±0.91% Film thickness: 1300nm Adhesive: AZ1500 (20CP)

±0.92% within 8-inch wafer ±1.10% between wafers Film thickness: 1350nm Adhesive: AZ1500 (20CP)