Flatbed coating machine

Product Description

This equipment is designed for high-precision laboratory coating processes. It features a modular, integrated structure, easy operation, and strong stability. Its core function is to achieve uniform coating of liquid/semi-liquid materials (such as photoresists, battery slurries, nano-coatings, and biological reagents) onto substrate surfaces through precise movement of the coating head at room or controlled temperature. Substrate types that can be processed include:

Glass/quartz wafers (for optical device preparation);

Silicon wafers/ceramic wafers (used in semiconductor/electronic component manufacturing);

Flexible substrates (such as PET and PI films, suitable for flexible electronics);

Metal foils (such as aluminum foil and copper foil, used for battery electrode coatings ).

The equipment is suitable for preparing a variety of functional coatings, such as:

Microelectronics field: integrated circuit photoresist coating, MEMS device insulating dielectric layer;

New energy field: lithium-ion battery positive and negative electrode slurry coating , solid-state battery electrolyte coating;

Optical field: preparation of optical thin film precursor coating and nano-antireflective coating;

Biomedical field: drug-loaded coatings, biosensor sensitive film coatings .

Features

1. High-precision coating performance

Coating head motion control: Using a servo motor to drive the linear guide rail, the coating speed can be precisely controlled within 0.1-200 mm/s, with a positioning accuracy of ±0.01 mm, supporting linear coating , curved coating and grid array coating modes.

Controllable coating thickness: By adjusting the distance between the coating head and the substrate (adjustable from 0.1 to 500 μm), slurry viscosity, and movement speed, precise control of coating thickness from nanometer to micrometer level (50 nm-500 μm) can be achieved, with a uniformity error of less than 3%.

2. Intelligent process control system

Full process automation: Equipped with a PLC programmable controller, it supports custom coating parameters (such as coating path, speed, number of times, interval time, etc.), can store more than 50 sets of process programs, and automatically completes processes such as substrate positioning, coating , and drying (optional) after one-click start.

Environmental parameter monitoring: Equipped with a temperature sensor (room temperature - 150°C, accuracy ±1°C) and a humidity sensor (accuracy ±2% RH), it supports real-time monitoring and closed-loop control of the coating environment to ensure process stability.

3. Flexible expansion capabilities

multiple coating heads: Standard precision wire rod coating head and scraper coating head, optional slit coating head, comma roller coating head or spray coating head to meet the coating needs of different materials (high viscosity slurry, low viscosity solution) .

Substrate size adaptability: Supports substrate sizes ranging from 10 mm × 10 mm to 300 mm × 300 mm. Equipped with a vacuum adsorption platform (with adjustable suction force) to ensure that the substrate is fixed without displacement during the coating process .

4. Humanized design and safety assurance

Visual operation interface: equipped with a color touch screen, real-time display of coating speed, position, temperature, vacuum degree and other parameters, support historical data storage and USB export function.

Safety protection mechanism: Equipped with emergency stop button, moving parts guardrail, leakage overload protection and other functions to ensure the safety of operators; the coating chamber can be equipped with an optional ventilation module to reduce the accumulation of volatile gases.

Easy maintenance: The coating head adopts a quick-detachable design, and cleaning and replacement can be completed within 5 minutes; the waste liquid collection tank is a drawer-type structure, which is convenient for quick cleaning.

5. Optional upgrade modules

Online detection components: A laser thickness gauge (accuracy ±1%) or a microscopic vision system can be installed to monitor coating thickness and uniformity in real time;

Heating/cooling platform: The substrate stage supports a temperature range of -20°C to 150°C with an accuracy of ±0.5°C, suitable for coating temperature-sensitive materials ;

Automatic feeding system: equipped with a precision metering pump (flow accuracy ±0.1%), supports continuous feeding or pulse dispensing and coating , reducing manual intervention.

Optional accessories

Typical application scenarios

1.Semiconductor manufacturing : coating photoresist on 8-inch silicon wafers for integrated circuit patterning;

2.New energy research and development : coating lithium iron phosphate slurry on the surface of aluminum foil to prepare lithium-ion battery positive electrode;

3.Flexible electronics : coating silver nano-ink on PI flexible substrate to prepare conductive circuits for wearable devices;

4.Optical device preparation : Titanium dioxide nano-slurry is coated on a glass substrate and sintered to form an optical anti-reflection coating;

5.Biosensor development : Enzyme solution is applied to a glass slide to prepare the sensitive detection area of the biochip.

Summary of equipment advantages

Versatile compatibility : supports a variety of coating modes (contact/non-contact), material types (solution/slurry/nanodispersion) and substrate sizes, meeting the needs of all stages from basic research to pilot production;

High precision and repeatability : The control accuracy of key parameters (thickness, speed, temperature) reaches the industry-leading level, and the repeatability error between experimental batches is less than 3%;

High efficiency and low consumption : Adopting energy-saving drive system, the energy consumption is 15% lower than that of traditional equipment under the same process, and it supports 24-hour continuous operation;

User-friendly : The interface is simple and intuitive, supporting one-click process start-up, allowing novices to quickly master the process with low maintenance costs.