Three temperature zones PECVD-1200℃

1. Equipment Introduction:

the three-zone 1200°C PECVD high-temperature vacuum furnace is constructed from alumina fiber. Its extremely low thermal conductivity and specific heat capacity ensure rapid furnace heating and low heat storage, making it particularly suitable for materials processing research in scientific research institutions. The heating element utilizes resistance wire heating, which promotes uniform temperature distribution within the furnace. The high-temperature vacuum resistance furnaces temperature control system utilizes a classic closed-loop negative feedback control system. The temperature controller utilizes an intelligent programmable temperature regulator and a power modulator. The load utilizes low-voltage, high-current control, significantly extending the life of the heating element. The temperature measuring element utilizes a K-type thermocouple. The single-loop temperature controller features self-tuning PID parameters, eliminating the need for operator intervention. It automatically adjusts the output signal to meet the heating and cooling requirements of different temperature curves. The system also features over-temperature, under-temperature, and burnout alarms, significantly reducing operator experience requirements. Key electrical components are high-quality imported products, ensuring high performance and maintenance-free operation, enhancing equipment reliability.

Applications: This equipment is primarily used for experimental and pilot-scale graphene growth and preparation. It can also be used for the growth of carbon nanotubes. It can produce high-quality transparent conductive films for applications such as mobile phone touch screens, tablets, smart wearables, and sensors.

2. Equipment parameters :