Intelligent PECVD System-D210

1. Product Features:

This is an intelligent PECVD system. The equipment is mainly divided into four parts: a multi-temperature zone tubular furnace, RF components, gas flow system, and automated control software integration system.

1. Open heating furnace

The heating furnace is made of ultra-light alumina fiber material, equipped with a K-type thermocouple and 6-point temperature control. The equipment has flexible temperature control and the heating furnace can be opened electrically to facilitate customers to replace and repair the reaction tube.

2. Gas system

The mass flow meter can accurately control the mixing ratio of multiple gases at different flow rates, and a separate gas can enter the reaction tube after passing through the bubbler.

3. RF components

The 1000W high-performance RF glow is uniform, allowing the entire reaction chamber to be in the glow generation area.

4. Intelligent control system

It adopts intelligent PID fuzzy control and 30-segment programmable control. It has over-temperature and burnout alarm functions.

 2. Product parameters: