Plasma cleaning machine PT13M-BE

1. Product Features :

1. Can process materials with complex shapes ;

2. No environmental pollution, no chemical consumption ;

3. Low-temperature plasma, with low energy and high density, is suitable for processing special materials ;

4. Suitable for substrates below 8 inches, one-button control, suitable for various experimental environments such as scientific research institutes .

2. Product parameters :

1. RF power supply: 13.56MHz ;

2. RF power: 0-200W (maximum 300W) ;

3. Matcher: automatic matching ;

4. Gas control: single float flowmeter ;

5. Cabin size: 226mm*126mm*224mm ;

6. Cabin material: aluminum alloy ;

7. Cabin volume: 6.4L ;

8. Effective processing size: L200×W200 ;

9. Time setting: 999 seconds ;

10. Vacuum pump: pumping speed 4m³/h ;

11. Gas stabilization time: 40 seconds ;

12. Vacuum degree: <10pa .